With the continuous evolution of computer technology, process simulation is becoming increasingly widely employed in various industries and utilizes simulation models to mimic business process behavior. Additionally, it can be adopted to predict and optimize system performance, assess the impact of decisions, provide a decision-making basis for managers, and reduce the experimental cost and time. Currently, how to efficiently develop a simulation model that can be trusted has caught widespread attention. This study traces, summarizes, and analyzes the relevant references on methods for building business process simulation models. Meanwhile, the processes, advantages, disadvantages, and progress of process model-based, system dynamics-based, and deep learning-based simulation modeling approaches are presented. Finally, the challenges and future directions of process simulation are discussed to provide references for future research in this field.